NFPA 318: Standard for the Protection of Semiconductor Fabrication Facilities

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Chemical safety and emergency response demand the 2015 NFPA 318: Standard for the Protection of Semiconductor Fabrication Facilities.

The semiconductor industry is continually growing, requiring new safeguards to address evolving hazards. Completely reorganized and up-to-date with the latest coverage of technologies such as photovoltaics, NFPA 318: Standard for the Protection of Semiconductor Fabrication Facilities applies to semiconductor fabrication facilities and comparable R&D areas in which hazardous chemicals are used, stored, and handled -- containing a cleanroom or clean zone or both.

Chapters address every aspect of safety, from general safety precautions and fire protection to construction, chemical storage and handling, hazardous gas cylinder storage and distribution, bulk silane systems, production and support equipment, emergency control station, and means of egress. This edition adds display panel and photovoltaic production to its scope, along with other major changes.

The 2015 NFPA 318 assists all stakeholders involved in fire protection: engineers, AHJs, facility personnel, and contractors.

This rewritten, clarified edition provides new definitions, identification of hazardous materials categories, and an introduction to Hazard Production Material (HPM) risk assessment. It also adds numerous new requirements addressing:

  • Hazardous materials
  • Liquid chemical storage and handling
  • Gas storage and handling
  • Production and support equipment
  • Waste treatment
  • Fire protection

Get the latest requirements for semiconductor fabrication facilities, in the most user-friendly format, in the 2015 NFPA 318. (Softbound, Approx. 31 pp., 2015)

NFPA<sup>®</sup> 318 Standard for the Protection of Semiconductor Fabrication Facilities 2015 Edition

NFPA® 318 Standard for the Protection of Semiconductor Fabrication Facilities 2015 Edition

Chapter 1 Administration
1.1 Scope
1.2 Purpose
1.3 Retroactivity
1.4 Equivalency
1.5 Units
Chapter 2 Referenced Publications
2.1 General
2.2 NFPA Publications
2.3 Other Publications
2.4 References for Extracts in Mandatory Sections
Chapter 3 Definitions
3.1 General
3.2 NFPA Official Definitions
3.3 General Definitions
Chapter 4 Building Construction and Related Services
4.1 General
4.2 Classification of Occupancy
4.3 Noncombustible Construction Components
4.4 Fire Resistance Rating
4.5 Pass-Throughs in Existing Exit Access Corridors
4.6 Vertical Openings
4.7 Air Supply and Recirculation Systems
4.8 Electrical Classification
4.9 Emergency Power System
4.10 Means of Egress
Chapter 5 Hazardous Materials — General Provisions
5.1 Hazardous Chemicals
5.2 HPM Risk Assesment
5.3 Container Delivery
5.4 Storage and Handling of Hazardous Chemicals
5.5 Separation of Hazardous Chemicals
5.6 Systems, Equipment, and Processes
5.7 Supply Piping
5.8 Welding
Chapter 6 Liquid Chemical Storage and Handling
6.1 General
6.2 Flammable and Combustible Liquid Delivery Systems
6.3 Spill Protection
6.4 Pyrophoric Liquids
6.5 Corrosive Liquids
6.6 Toxic and Highly Toxic Materials
6.7 Water Reactive Chemistries
6.8 Oxidizers
Chapter 7 Gas Storage and Handling
7.1 General
7.2 Corrosive Gases
7.3 Flammable Gases
7.4 Oxidizing Gases
7.5 Pyrophoric Gases
7.6 Silane Systems
7.7 Toxic and Highly Toxic Gases
7.8 Unstable Reactive Gases
7.9 Cryogenic Fluids
7.10 Bulk Oxygen Systems
7.11 Gaseous Hydrogen Systems
7.12 Liquefied Hydrogen Systems
7.13 Gas Generation Systems
7.14 Dopant Gas Sources
Chapter 8 Production and Support Equipment
8.1 General
8.2 Materials of Construction
8.3 Equipment Safety Systems and Interlocks
8.4 Electrical Design
8.5 Process Liquid Heating Equipment
8.6 General Requirements for Tools Using Flammable or Combustible Liquids
8.7 Photolithography Tools
8.8 Ion Implanters
8.9 Wet Process and Wet Etch Tools
8.10 CVD and Furnace Tools
8.11 Automated Materials Handling Systems (AMHS)
8.12 Support Equipment
8.13 Production Equipment Fire Protection
8.14 Exposures
Chapter 9 Exhaust Systems
9.1 General Exhaust Conditions
9.2 Local Hazardous Chemical Exhaust System
9.3 Local Hazardous Chemical Exhaust System Construction
9.4 Hazardous Chemical Exhaust Duct Airflow and Dilution
9.5 Exhaust Ducts
9.6 Hazardous Chemical Exhaust Controls
Chapter 10 Waste Treatment
10.1 Waste Recovery and Handling Systems
10.2 Acid Waste Treatment Facility Safeguards
10.3 Organic Waste Treatment Facilities
10.4 Waste Liquid Handling
10.5 Effluent Treatment Systems
10.6 Scrubbers
10.7 Vapor Recovery and Vapor Processing Systems
Chapter 11 Fire Protection
11.1 Facility-Wide Systems
11.2 Protection of Specific Facility Elements
Chapter 12 General Safety Precautions
12.1 Emergency Plan
12.2 Emergency Response Team
12.3 Emergency Drills
Annex A Explanatory Material
Annex B Seismic Protection
Annex C Production and Support Equipment
Annex D Informational References